Development of a Vertically Configured MEMS Heat Flux Sensor

Heat flux sensors (HFSs) have potential in enabling applications that require direct and instantaneous tracking of thermal energy transfer. To facilitate the widespread use sensors, to be robust feasible implement, while maintaining high sensitivity, fast response time, low obtrusiveness. However, most currently available HFSs are either challenging manufacture or ill-suited for surface heat measurement because their mechanical characteristics. In this article, design a novel microelectromechanical systems (MEMS) HFS structure intended measurements is presented. A prototype batch manufactured electrical performance compared with commercially HFSs. Results show similar sensitivity as commercial can made by using MEMS methods.